ISO/NP 25483

Surface chemical analysis — Scanning Probe Microscopy — Scale Calibration for the AFM Measurement of Critical Dimension

Scope

This International Standard specifies a method to calibrate the measurement scale and offset value of atomic force microscopes (AFM) in the x and y directions using certified reference materials and to determine the critical dimensions of the nano lines using the identical measurement conditions.

This international Standard is recommended to be applied for the measurement of critical dimensions of nano structured materials. Especially, this standard will be useful for the practical measurement of AFM because the offset value related with the shape of AFM tip should be precisely determined for the reliable measurement.