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ISO/NP 17109

ISO/NP 17109

Surface chemical analysis — Depth profiling — A method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter depth profiling using multi-layer thin films

General information

Current stage: 10.98 New project rejected May 10, 2011

Originator: ISO

Owner: ISO/TC 201/SC 4 Depth profiling

Type: International Standard

ICS: 71.040.40 Chemical analysis

Life cycle

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ABANDON
ISO/NP 17109
10.98 New project rejected
May 10, 2011