ISO/CD 25797

Fine ceramics (advanced ceramics, advanced technical ceramics) --Test method for determining amount-of-substance of deposited materials and physical film thickness by using X-ray fluorescence spectrometry

Scope

This international standard specifies a method of X-ray fluorescence (XRF) spectrometry for measuring amount-of-substance of deposited materials which can derive film thickness or relative film density of fine ceramic coatings or metal films on a substrate.