ISO/AWI TS 23367-3

Nanotechnologies — Performance evaluation of nanosensors for chemical and biomolecule detection — Part 3: Analytical performance of semiconductor field effect transistor (FET) sensor ISO/AWI TS 23367-3

Scope

This document specifies the analytical performance requirements and test methods for silicon-based nanowire/nano plate field effect transistor (FET) sensors used in molecule detecting devices. It
defines key performance parameters, including sensitivity, selectivity, exclusivity, and limit of detection. This standard provides guidance for manufacturers in evaluating the performance characteristics of these sensors.