ISO/AWI 26210

Surface chemical analysis — Atomic force microscopy — Guideline for quantitative nanoscale potential measurement by Kelvin probe force microscopy ISO/AWI 26210

Scope

This document describes the standard procedures for the quantitative use of Kelvin probe force microscopy (KPFM). It includes reproducible measurements of contact potential differences (CPD), reliable deduction of the work function of the KPFM probe-tip in use, and quantitative evaluation of the lateral resolutions of CPD imaging with KPFM. This document is applicable to the quantitative analysis of KPFM surface potential imaging of solid material surfaces at the nanoscale.