ISO/AWI 25178-608

Geometrical product specification (GPS) — Surface texture: Areal — Part 608: Design and characteristics of non-contact (digital holographic microscopy) instruments

Scope

This document specifies the design and metrological characteristics of digital holographic microscopy (DHM) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.