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ISO/AWI 23131-4

Ellipsometry — Part 4: Semi-transparent single layer model ISO/AWI 23131-4

General information

20.00   New project registered in TC/SC work programme   Aug 19, 2026

ISO

ISO/TC 107 Metallic and other inorganic coatings

International Standard

Scope

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a semi-transparent layer and for the determination of the optical (refractive index n and extinction coefficient k) or dielectric (real part ε1 and imaginary part ε2) constants/functions based on the semi-transparent single layer model.

Life cycle

NOW

IN_DEVELOPMENT
ISO/AWI 23131-4
20.00 New project registered in TC/SC work programme
Aug 19, 2026




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