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ISO 3530:1979

Vacuum technology — Mass-spectrometer-type leak-detector calibration ISO 3530:1979

Publication date:   Sep 1, 1979

General information

90.93 Standard confirmed   Nov 12, 2021

ISO

ISO/TC 135/SC 6 Leak testing

International Standard

23.160   Vacuum technology

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Scope

Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.

Life cycle

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PUBLISHED
ISO 3530:1979
90.93 Standard confirmed
Nov 12, 2021