ISO 27911:2011

Surface chemical analysis — Scanning-probe microscopy — Definition and calibration of the lateral resolution of a near-field optical microscope ISO 27911:2011

General information

Current stage: 90.60 Close of review Dec 3, 2023

Originator: ISO

Owner: ISO/TC 201/SC 9 Scanning probe microscopy

Type: International Standard

ICS: 71.040.40 Chemical analysis

Scope

ISO 27911:2011 describes a method for determining the spatial (lateral) resolution of an apertured near-field scanning optical microscope (NSOM) by imaging an object with a size much smaller than the expected resolution. It is applicable to aperture-type NSOMs operated in the transmission, reflection, collection or illumination/collection mode.

Life cycle

NOW

PUBLISHED
ISO 27911:2011
90.60 Close of review
Dec 3, 2023