60.60 Standard published May 4, 2026
ISO
ISO/TC 213 Dimensional and geometrical product specifications and verification
International Standard
17.040.40 Geometrical Product Specification (GPS)
This document specifies the design and characteristics of focus variation instruments for areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements as well.
This document applies to focus variation without pattern illumination or with fixed pattern illumination. This document does not cover methods using varying pattern illumination during the measurement.
WITHDRAWN
ISO 25178-606:2015
PUBLISHED
ISO 25178-606:2026
60.60
Standard published
May 4, 2026