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ISO 25178-604:2025

Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments

Publication date:   Feb 14, 2025

General information

60.60   Standard published   Feb 14, 2025

ISO

ISO/TC 213 Dimensional and geometrical product specifications and verification

International Standard

17.040.20   Properties of surfaces

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Scope

This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.

Life cycle

PREVIOUSLY

WITHDRAWN
ISO 25178-604:2013

NOW

PUBLISHED
ISO 25178-604:2025
60.60 Standard published
Feb 14, 2025