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ISO 25178-604:2013

Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments

Publication date:   Jul 24, 2013

95.99   Withdrawal of Standard   Feb 14, 2025

General information

95.99   Withdrawal of Standard   Feb 14, 2025

ISO

ISO/TC 213 Dimensional and geometrical product specifications and verification

International Standard

17.040.20   Properties of surfaces

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Scope

ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.

Life cycle

NOW

WITHDRAWN
ISO 25178-604:2013
95.99 Withdrawal of Standard
Feb 14, 2025

REVISED BY

PUBLISHED
ISO 25178-604:2025