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ISO 25164:2026

Physical vapor deposition coatings — Magnetron sputtering deposition of TiAlSiN thin films — Specification

Publication date:   Aug 3, 2026

General information

60.60   Standard published   Aug 3, 2026

ISO

ISO/TC 107/SC 9 Physical vapor deposition coatings

International Standard

25.220.40   Metallic coatings

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Scope

This document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering.
This document is also applicable to the deposition of TiN, TiAlN or TiSiN thin films.

Life cycle

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PUBLISHED
ISO 25164:2026
60.60 Standard published
Aug 3, 2026