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ISO 24688:2022

Determination of modulation period of nano-multilayer coatings by low-angle X-ray methods ISO 24688:2022

Publication date:   Jul 22, 2022

General information

60.60 Standard published   Jul 22, 2022

ISO

ISO/TC 107/SC 9 Physical vapor deposition coatings

International Standard

25.220.01   Surface treatment and coating in general

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Scope

This document specifies the substrate conditions and testing of the modulation period (including the principles for low-angle X-ray methods, the requirements of the coatings, the requirements for X-ray measuring apparatus, the calibration of apparatus and samples, and the testing conditions and calculation process) of nano-multilayer coatings by low-angle X-ray methods including X-ray reflectivity (XRR) and glancing incident X-ray diffraction (GIXRD).

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PUBLISHED
ISO 24688:2022
60.60 Standard published
Jul 22, 2022