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ISO 23216:2021

Carbon based films — Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry

Publication date:   May 4, 2021

General information

60.60 Standard published   May 4, 2021

ISO

ISO/TC 107 Metallic and other inorganic coatings

International Standard

25.220.99   Other treatments and coatings

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Scope

This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.
It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.
It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.

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PUBLISHED
ISO 23216:2021
60.60 Standard published
May 4, 2021