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ISO 23131-3:2026

Ellipsometry — Part 3: Transparent single layer model ISO 23131-3:2026

Publication date:   Jan 30, 2026

General information

60.60   Standard published   Jan 30, 2026

ISO

ISO/TC 107 Metallic and other inorganic coatings

International Standard

17.020   Metrology and measurement in general

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Scope

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.

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PUBLISHED
ISO 23131-3:2026
60.60 Standard published
Jan 30, 2026




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