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ISO 19606:2024

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy ISO 19606:2024

Publication date:   Nov 1, 2024

General information

60.60   Standard published   Nov 1, 2024

ISO

ISO/TC 206 Fine ceramics

International Standard

81.060.30   Advanced ceramics

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Scope

This document specifies a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy. This method applies to surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, Rsm, in the range of about 0,04 μm to 2,5 μm.

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WITHDRAWN
ISO 19606:2017

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PUBLISHED
ISO 19606:2024
60.60 Standard published
Nov 1, 2024




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