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ISO 18115-3:2022

Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis ISO 18115-3:2022

Publication date:   Jun 30, 2022

General information

60.60 Standard published   Jun 30, 2022

ISO

ISO/TC 201/SC 1 Terminology

International Standard

01.040.71   Chemical technology (Vocabularies) | 71.040.40   Chemical analysis

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This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.

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PUBLISHED
ISO 18115-3:2022
60.60 Standard published
Jun 30, 2022