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ISO 16531:2020

Surface chemical analysis — Depth profiling — Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS

Publication date:   Oct 5, 2020

General information

60.60 Standard published   Oct 5, 2020

ISO

ISO/TC 201/SC 4 Depth profiling

International Standard

71.040.40   Chemical analysis

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Scope

This document specifies methods for the alignment of the ion beam to ensure good depth resolution in sputter depth profiling and optimal cleaning of surfaces when using inert gas ions in Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS). These methods are of two types: one involves a Faraday cup to measure the ion current; the other involves imaging methods. The Faraday cup method also specifies the measurements of current density and current distributions in ion beams. The methods are applicable for ion guns with beams with a spot size less than or equal to 1 mm in diameter. The methods do not include depth resolution optimization.

Life cycle

PREVIOUSLY

WITHDRAWN
ISO 16531:2013

NOW

PUBLISHED
ISO 16531:2020
60.60 Standard published
Oct 5, 2020