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ISO 13083:2015

Surface chemical analysis — Scanning probe microscopy — Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes

Publication date:   Aug 20, 2015

General information

90.93 Standard confirmed   Oct 14, 2022

ISO

ISO/TC 201/SC 9 Scanning probe microscopy

International Standard

71.040.40   Chemical analysis

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Scope

ISO 13083:2015 describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.

Life cycle

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PUBLISHED
ISO 13083:2015
90.93 Standard confirmed
Oct 14, 2022