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ISO 11952:2014

Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems

Publication date:   May 12, 2014

95.99 Withdrawal of Standard   May 21, 2019

General information

95.99 Withdrawal of Standard   May 21, 2019

ISO

ISO/TC 201/SC 9 Scanning probe microscopy

International Standard

71.040.40   Chemical analysis

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Scope

ISO 11952:2014 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.

Life cycle

NOW

WITHDRAWN
ISO 11952:2014
95.99 Withdrawal of Standard
May 21, 2019

REVISED BY

PUBLISHED
ISO 11952:2019