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IEC TS 62607-8-5 ED1

Nanomanufacturing - Key control characteristics - Part 8-5: Metal-oxide interfacial devices - Oxygen distribution: secondary ion mass spectrometry

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30.60   Close of voting/ comment period   Nov 7, 2025

IEC

TC 113

Technical Specification

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IEC TS 62607-8-5 ED1
30.60 Close of voting/ comment period
Nov 7, 2025