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IEC/TR 63258:2021

Nanotechnologies — A guideline for ellipsometry application to evaluate the thickness of nanoscale films

Publication date:   Mar 22, 2021

General information

60.60 Standard published   Mar 22, 2021

IEC

ISO/TC 229 Nanotechnologies

Technical Report

07.120   Nanotechnologies

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Scope

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.


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PUBLISHED
IEC/TR 63258:2021
60.60 Standard published
Mar 22, 2021