IEC 62899-503-3:2021 ED1

Printed electronics - Part 503-3: Quality assessment - Measuring method of contact resistance for the printed thin film transistor - Transfer length method

Publication date:   Aug 24, 2021

General information

60.60 Standard published   Aug 24, 2021

IEC

TC 119

International Standard

29.045   Semiconducting materials | 31.080.30   Transistors

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Scope

IEC 62899-503-3:2021(E) specifies a measuring method of contact resistance for printed thin film transistors (TFTs) by the transfer length method (TLM). The method requires the fabrication of a test element group (TEG) with varying channel length (L) between source and drain electrodes. The method is intended for quality assessment of TFT electrode contacts and is suited for determining whether the contact resistance lies within a desired range.

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PUBLISHED
IEC 62899-503-3:2021 ED1
60.60 Standard published
Aug 24, 2021