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IEC 62374:2007 ED1

Semiconductor devices - Time dependent dielectric breakdown (TDDB) test for gate dielectric films

Publication date:   Mar 29, 2007

General information

60.60   Standard published   Mar 29, 2007

IEC

TC 47

International Standard

31.080.99   Other semiconductor devices

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Scope

Provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure

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PUBLISHED
IEC 62374:2007 ED1
60.60 Standard published
Mar 29, 2007