0

IEC 62047-28:2017 ED1

Semiconductor devices - Micro-electromechanical devices - Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices IEC 62047-28:2017 ED1

Publication date:   Jan 20, 2017

General information

60.60 Standard published   Jan 20, 2017

IEC

TC 47

International Standard

31.080.99   Other semiconductor devices

Buying

Published

Language in which you want to receive the document.

Scope

IEC 62047-28:2017(E) specifies terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application.
This document applies to vibration driven electret energy harvesting devices whose electrodes with a gap below 1 000 μm are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition.

Life cycle

NOW

PUBLISHED
IEC 62047-28:2017 ED1
60.60 Standard published
Jan 20, 2017