EN ISO 23216:2022

Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry (ISO 23216:2021)

Publication date:   Apr 18, 2023

General information

60.60 Standard published   Nov 9, 2022

CEN

CEN/TC 262 Metallic and other inorganic coatings, including for corrosion protection and corrosion testing of metals and alloys

European Norm

25.220.99   Other treatments and coatings

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Scope

This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.
It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.
It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.

Life cycle

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PUBLISHED
EN ISO 23216:2022
60.60 Standard published
Nov 9, 2022

Relations

Adopted from ISO 23216:2021 IDENTICAL