EN ISO 23131:2022

Ellipsometry - Principles (ISO 23131:2021)

Publication date:   Mar 16, 2023

General information

60.60 Standard published   Nov 9, 2022

CEN

CEN/TC 262 Metallic and other inorganic coatings, including for corrosion protection and corrosion testing of metals and alloys

European Norm

17.020   Metrology and measurement in general

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Scope

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

Life cycle

NOW

PUBLISHED
EN ISO 23131:2022
60.60 Standard published
Nov 9, 2022

Relations

Adopted from ISO 23131:2021 IDENTICAL