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EN ISO 14644-10:2013

Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013) EN ISO 14644-10:2013

Publication date:   May 17, 2013

General information

99.60 Withdrawal effective   May 18, 2022

CEN

CEN/TC 243 Cleanroom technology

European Norm

13.040.35   Cleanrooms and associated controlled environments

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Scope

ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

Life cycle

NOW

WITHDRAWN
EN ISO 14644-10:2013
99.60 Withdrawal effective
May 18, 2022

REVISED BY

PUBLISHED
EN ISO 14644-10:2022