CEN ISO/TS 80004-8:2020

Nanotechnologies - Vocabulary - Part 8: Nanomanufacturing processes (ISO/TS 80004-8:2020)

Publication date:   Apr 15, 2021

General information

60.60 Standard published   Dec 2, 2020

CEN

CEN/TC 352 Nanotechnologies

Technical Specification

01.040.07   Natural and applied sciences (Vocabularies) | 07.120   Nanotechnologies

Buying

  Published

PDF - €50.63

  English  



Buy

Scope

This document defines terms related to nanomanufacturing processes in the field of nanotechnologies.
All the process terms in this document are relevant to nanomanufacturing, however, many of the listed processes are not exclusively relevant to the nanoscale. Terms that are not exclusive are noted within the definitions. Depending on controllable conditions, such processes can result in material features at the nanoscale or, alternatively, at larger scales.
There are many other terms that name tools, components, materials, systems control methods or metrology methods associated with nanomanufacturing that are beyond the scope of this document.
Terms and definitions from other parts of the ISO/TS 80004 series are reproduced in Clause 3 for context and better understanding.

Life cycle

PREVIOUSLY

WITHDRAWN
CEN ISO/TS 80004-8:2015

NOW

PUBLISHED
CEN ISO/TS 80004-8:2020
60.60 Standard published
Dec 2, 2020