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ISO 25178-603:2013

Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments ISO 25178-603:2013

Publication date:   Sep 25, 2013

General information

90.92 Standard to be revised   Oct 4, 2022

ISO

ISO/TC 213 Dimensional and geometrical product specifications and verification

International Standard

17.040.20   Properties of surfaces

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Published

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Scope

ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

Life cycle

NOW

PUBLISHED
ISO 25178-603:2013
90.92 Standard to be revised
Oct 4, 2022

REVISED BY

IN_DEVELOPMENT
ISO/DIS 25178-603