IEC/IEEE 62659:2015 ED1

Nanomanufacturing - Large scale manufacturing for nanoelectronics IEC/IEEE 62659:2015 ED1

Publication date:   Sep 30, 2015

Scope

IEC/IEEE 62659:2015(E) provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way.