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EN ISO 14644-15:2017

Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017) EN ISO 14644-15:2017

Publication date:   Feb 14, 2018

General information

60.60 Standard published   Dec 6, 2017

CEN

CEN/TC 243 Cleanroom technology

European Norm

13.040.35   Cleanrooms and associated controlled environments

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Scope

ISO 14644-15:2017 provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644‑8).
The following are outside the scope of ISO 14644-15:2017:
- health and safety requirements;
- compatibility with cleaning agents and techniques;
- cleanability;
- biocontamination;
- specific requirements of equipment and materials for processes and products;
- design details of equipment.

Life cycle

NOW

PUBLISHED
EN ISO 14644-15:2017
60.60 Standard published
Dec 6, 2017