EN ISO 14644-2:2015

Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration (ISO 14644-2:2015)

Publication date:   Feb 15, 2016

General information

60.60 Standard published   Dec 23, 2015

CEN

CEN/TC 243 Cleanroom technology

European Norm

13.040.35   Cleanrooms and associated controlled environments

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Scope

ISO 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.
ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.

Life cycle

PREVIOUSLY

Replaces
EN ISO 14644-2:2000

NOW

PUBLISHED
EN ISO 14644-2:2015
60.60 Standard published
Dec 23, 2015