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prEN IEC 63567-3

Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment - Part 3: Nano-scale wafer surface inspection method using UV light prEN IEC 63567-3

General information

10.99 New project approved   Nov 25, 2024

CENELEC

CLC/TC 47X

European Norm

31.080.99   Other semiconductor devices

Life cycle

NOW

IN_DEVELOPMENT
prEN IEC 63567-3
10.99 New project approved
Nov 25, 2024