60.60 Standard published Nov 1, 2024
ISO
ISO/TC 206 Fine ceramics
International Standard
81.060.30 Advanced ceramics
Published
This document specifies a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy. This method applies to surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, Rsm, in the range of about 0,04 μm to 2,5 μm.
WITHDRAWN
ISO 19606:2017
PUBLISHED
ISO 19606:2024
60.60
Standard published
Nov 1, 2024