ISO/CD 4508

Surface chemical analysis--Scanning probe microscopy-Guideline for the method and procedure for determining the temperature effects on AFM dimensional measurements

Scope

This International Standard specifies the guidelines of the method and procedure for determining the effect of temperature on atomic force microscope (AFM) nano-scale dimension measurements. The effect of temperature can be evaluated by continuously measuring the changes of the X- and Y- pitches and height of a two-dimensional (2D) calibration grating in an environmental temperature controllable AFM. If necessary, this method and procedure can be used to evaluate the effect of temperature on dimension measurement of other scanning probe microscopes(SPMs).