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ISO 22493:2014

Microbeam analysis — Scanning electron microscopy — Vocabulary ISO 22493:2014

Publication date:   Apr 9, 2014

General information

90.60 Close of review   Sep 3, 2019

ISO

ISO/TC 202/SC 1 Terminology

International Standard

37.020   Optical equipment | 01.040.37   Image technology (Vocabularies)

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Scope

ISO 22493:2014 defines terms used in the practice of scanning electron microscopy (SEM). It covers both general and specific concepts, classified according to their hierarchy in a systematic order, with those terms that have already been defined in ISO 23833 also included, where appropriate.
ISO 22493:2014is applicable to all standardization documents relevant to the practice of SEM. In addition, some clauses of ISO 22493:2014 are applicable to documents relevant to related fields (e.g. EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.

Life cycle

PREVIOUSLY

WITHDRAWN
ISO 22493:2008

NOW

PUBLISHED
ISO 22493:2014
90.60 Close of review
Sep 3, 2019