90.60 Close of review Sep 3, 2019
ISO/TC 202/SC 1 Terminology
37.020 Optical equipment | 01.040.37 Image technology (Vocabularies)
ISO 22493:2014 defines terms used in the practice of scanning electron microscopy (SEM). It covers both general and specific concepts, classified according to their hierarchy in a systematic order, with those terms that have already been defined in ISO 23833 also included, where appropriate.
ISO 22493:2014is applicable to all standardization documents relevant to the practice of SEM. In addition, some clauses of ISO 22493:2014 are applicable to documents relevant to related fields (e.g. EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.
90.60 Close of review
Sep 3, 2019