EN 60204-33:2011

Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment EN 60204-33:2011

Publication date:   Apr 19, 2011

General information

60.60 Standard published   Mar 4, 2011

CENELEC

CLC/TC 44X Safety of machinery: electrotechnical aspects

European Norm

13.110   Safety of machinery | 25.040.30   Industrial robots. Manipulators | 29.020   Electrical engineering in general

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Scope

IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.

Related legislation

Legislation related to this standard

2006/42/EC

Directive 2006/42/EC of the European Parliament and of the Council of 17 May 2006 on machinery, and amending Directive 95/16/EC (recast)

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Life cycle

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PUBLISHED
EN 60204-33:2011
60.60 Standard published
Mar 4, 2011

Relations

Adopted from IEC 60204-33:2009 MODIFIED